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bd nav_pfeil_grsolutions nav_pfeil_grLithography & nanoengineering nav_pfeil_grRAITH50  back_navzeile_rechts
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RAITH50

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RAITH50 是通用的电子束光刻工具，适用于微机电系统(MEMS)和光学干涉元件的研发。

可操作最大2平方英寸内的样品。
Key applications
  • Direct write on up to 2 inch samples with sub 100 nm resolution, ideal for MEMS applications
  • Optical elements like photonic crystals, beam splitters, gratings, DFB lasers or waveguides
  • Metrology, SEM inspection and sample navigation
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