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bd nav_pfeil_grsolutions nav_pfeil_grLithography & nanoengineering nav_pfeil_grRAITH150-TWO  back_navzeile_rechts
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RAITH150-TWO

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...offers modern EBL system architecture AND its mini-environment renders infrastructure investments unnessecary .

...is the right choice for

Researchers and universities

  • Easy to learn and to use for all skill levels
  • Multi-user management supports concurrent access by multiple users with different privileges

Industrial and academic development groups

  • Professional-grade design files
  • Automated task lists
  • Device, wafer or mask level operation

Centralized nano and service centers

  • Multi-project wafer exposures
  • Fastest operation speed
  • Well-established support with professional support teams

...enables extensive applications

  • Ultra High Resolution (UHR) exposures
  • Mix-and-match with optical lithography
  • Advanced device prototyping
  • High resolution template writing
  • Optical devices with zero error
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Electron beam lithography system_RAITH150-TWO_pic1.jpg
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RAITH150-TWO
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Electron beam lithography applications_RAITH150-TWO_pic2.jpg
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5 nm lines exposed in HSQ resist
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Electron beam lithography applications_RAITH150-TWO_pic3.jpg
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Stitching-free delay waveguide
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