ELPHY Plus

ELPHY software features

• Hierarchical fully integrated layout editor/viewer
• Data import for , and ASCII data
• Exposure parameter adjustment and calculation
• Macro generation and VB scripting
• Digital image acquisition
• Line width measurement capabilities
• SEM/FIB remote control and FIB module
• A second offline licence is included
• Optional: Fully integrated correction and parameter calculation

ELPHY Plus hardware features

• 6 MHz high-speed pattern generation hardware (19 inch Unit decoupled from PC)
• Fast, noise-reduced, deglitched and high performance 16 bit DAC vector scan beam deflection
• 16 bit DAC vector scan beam deflection
• 2 ns writing speed resolution
• TTL and 100 V blanking signal drivers
• 12 bit AD channel for reading detector signal (image acquisition)
• TTL signal for FIB/SEM external beam control request
• 3 additional DAC per channel for alignment and calibration (hardware for scaling, rotation / orthogonality and shift)
• Decoupling from PC electronics and thermo control for main and calibration DACs