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ELPHY Plus

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ELPHY Plus is a high end advanced lithography package for your SEM or FIB, and is typically chosen for use for Field Emission SEM or FIB with electrostatic deflection.

The high speed ELPHY Plus hardware architecture offers lowest noise, best signal quality and stability even at high writing speeds. No PC based approach can match the performance of the ELPHY Plus hardware.
Raith's world wide support infrastructure for installation and training at your site warrants that you will able to pattern and inspect results within the shortest possible time.
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Electron beam lithography attachment_ELPHY Plus_pic1.jpg
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ELPHY Plus beam controller electronics
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