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bd nav_pfeil_grsolutions nav_pfeil_grSEM & FIB lithography kits nav_pfeil_grELPHY Quantum  back_navzeile_rechts
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ELPHY Quantum

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ELPHY software features

  • Hierarchical fully integrated layout editor/viewer
  • Data import for , and ASCII data
  • Exposure parameter adjustment and calculation
  • Macro generation and VB scripting
  • Digital image acquisition
  • Line width measurement capabilities
  • SEM/FIB remote control and FIB module
  • A second offline licence is included
  • Optional: Fully integrated correction and parameter calculation

ELPHY Quantum hardware features

  • TTL - blanking signal output
  • TTL - SEM/FIB external scan enable/disable
  • TTL signal for FIB/SEM external beam control request
  • 3 additional DAC per channel alignment and calibration ( hardware for scaling, rotation / orthogonality and shift)
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