Lithography & nanoengineering
SEM & FIB lithography kits
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SEM & FIB lithography kits
ELPHY Quantum
ELPHY Quantum
ELPHY
software features
Hierarchical fully integrated
GDSII
layout editor/viewer
Data import for
DXF
,
CIF
and ASCII data
Exposure parameter adjustment and calculation
Macro generation and VB scripting
Digital image acquisition
Line width measurement capabilities
SEM/FIB remote control and FIB module
A second offline licence is included
Optional: Fully integrated
proximity effect
correction and parameter calculation
ELPHY
Quantum
hardware features
TTL - blanking signal output
TTL - SEM/FIB external scan enable/disable
TTL signal for FIB/SEM external beam control request
3 additional DAC per channel alignment and calibration ( hardware for scaling, rotation / orthogonality and shift)
previous page
2/2
ELPHY brochure
Installation requirements and useful options for SEM lithography
References
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Raith Micrograph Award 2010 - final stage
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Thailand
Turkey
USA
Vietnam
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