Compact laser interferometer controlled stage - CLS

Features and benefits at a glance

• applications become possible
• Improved positioning performance for more reliable multilevel tasks with mark registration
• Excellent mechanical stability by proven compact stage concept
• Compatible with many state of the art SEM and FIB - adaptation to new models possible
• No interference with the SEM and FIB electronics
• Joystick control for nm/s to mm/s speed
• Positioning performance is independent from any electron or ion column settings
• No modification required to original instrument - factory status reconfigurable
• 45 x 45 x 25 mm travel in X,Y and Z
• Sub 10 nm positioning control by software and visual inspection