To extend the capabilities of your ELPHY based SEM lithography tool the compact laser interferometer controlled stage -CLS- will replace your original SEM stage.
The positioning performance is greatly improved. Automated exposures involving and precise will become possible. The Piezo-DC motor hybrid technology, is in a closed loop control with the interferometer. Therefore no calibrations are required for CLS positioning performance, as it is completely independent from any SEM or FIB settings.
The CLS is available for many SEM or FIB single column instruments. The CLS may also be adapted to new instruments. In any case, such implementation and investment requires a thorough evaluation and discussion, even in the early stages of your budgeting.
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